HaloVac®精密真空泵油是专为精密真空泵应用中所需的低蒸汽压和粘度特性而设计的氟化润滑剂。 HaloVac® oils are designed for use as nonflammable and nonreactive lubricants in continuous operations that involve oxidizing environments, or hazardous chemicals. HaloVac® oils are routinely used in applications ranging from plasma etching and chemical vapor deposition in semiconductor fabrication to the vacuums used reactive gas handling and electron microscopy. These oils significantly reduce the safety and exposure risks associated with the routine operation, maintenance, and waste disposal common in these applications.

Key Performance Characteristics:

Chemically inert

Non-toxic

No sludge-formation

Nonflammable (no flash or fire point)

High thermal stability

Exceptional resistance to Lewis-Acids

Low vapor pressure

underwent no weight loss

did not experience a reduction in viscosity

had no change in pH, and no increase in acidity

encapsulated volatile organic compound

emitted no discernable fumes or acidic odors